It is mainly used for physical vapor deposition (PVD) and magnetron sputtering.

Titanium and its alloy targets have excellent corrosion resistance, high strength, and good biocompatibility,

and are widely applied in the fields of semiconductors, aerospace, medical devices, and decorative films, etc.

1.Characteristics

1) Excellent physicochemical performance

・Low density (4.5 g/cm³)

・High melting point (1668°C)

・Good corrosion resistance

2）Good mechanical performance

・High strength (tensile strength ≥240 MPa), relatively good plasticity

・Good toughness, difficult to crack, suitable for high power sputtering

3) Excellent biocompatibility

・Titanium has good compatibility with human tissues and is suitable for medical treatment.

4) Alloying available

・Thin film properties such as hardness and electrical conductivity can be adjusted with alloy targets such as 

Ti-Al, Ti-Ni, Ti-Cu, and Ti-Cr.

2. Main Applications

1) Semiconductor and electronics industry

・Integrated circuits (IC): Used to create a barrier layer to prevent copper diffusion.

・Displays (TFT-LCD/OLED): Used as a base material for electrodes or transparent conductive oxide (TCO).

・Storage devices: Metallization layer for hard disks and flash memory.

2) Optical Coatings

・Transmission coatings (AR Coating): Used for optical elements such as lenses and filters.

・Reflective coatings: Suitable for optical devices such as lasers and telescopes.

3）Medical equipment

4) Aerospace

・Engine blades and spacecraft casings: Titanium coatings withstand high temperatures and provide antioxidant protection.

・Satellite optical lenses: Titanium plating improves reflectivity and durability.

5) Decorative and protective coatings

6) New Energy

7) Solar cells