An important sputtering target material, mainly made from high-purity metal Mn or Mn alloys, and widely applied in fields such as semiconductors, magnetic memory, and new energy.

1. Characteristics

 1) High density and uniformity

    ・Mn targets have relatively high density (~ 7.47 g/cm³), ensuring stable atomic flow during sputtering and forming uniform and

       dense thin films.

    ・The crystal grain size is uniform (< 50 μm), which reduces defects during sputtering.

 2) Excellent thermal conductivity

    ・Mn target has good thermal conductivity and can effectively dissipate heat, preventing overheating of the target during

       sputtering and improving the stability of film deposition.

 3) High temperature stability

    ・The melting point of Mn can reach 1246°C, and the stability of physical and chemical properties can be maintained under high      temperature sputtering environment.

 4) Good electrochemical properties

    ・Mn has higher electrochemical activity and is suitable for the production of battery electrode materials (e.g., lithium manganese

       oxide battery).

 5) Excellent magnetic properties

    ・Mn is ferromagnetic and can be used for thin film deposition in high density magnetic recording media such as hard disk drive     HDD.

 6) Corrosion resistance

   ・Mn has good oxidation resistance at room temperature, but is easy to oxidation in a wet environment.　
   Mn should be stored and used in a vacuum or in an inert environment.

 2. Main Applications

 1) Semiconductor and microelectronics industries

    ・Production of conductive layers for integrated circuits, magnetic thin films, and sensors.

    ・Cu-Mn alloy targets can optimize the conductivity and anti-oxidation properties of semiconductor devices.

2) Magnetic storage industry

    ・Deposition of magnetic thin films for hard disk drives (HDD), magnetic random memory (MRAM), and increased storage     

       density.

3) New energy and battery technology

    ・Production of cathode materials for lithium manganese oxide batteries (LiMn₂O₄), improving battery energy density and cycle

       life.

    ・Transparent conductive thin film (TCO) in solar cells.

4) Optical coatings

    ・Anti-reflective or highly reflective coatings for LEDs, solar cells, and optical lenses.

5) Surface engineering

    ・Wear-resistant and corrosion-resistant coatings for tools, aerospace parts, etc.

6) Nanomaterials research

    ・Mn oxide nanoparticles such as MnO and Mn₃O₄ used in fields such as catalysis, sensing, and biomedicine.