Hafnium (Hf) Target

Hf is a transition metal with high melting point and corrosion resistance, similar to the chemical properties of Zr, and coexists with Zr.

Its target materials are used in thin film deposition processes (e.g. PVD, CVD) and have important applications in semiconductor, nuclear, aerospace, and other fields.

1. Characteristics

１）High melting point and high temperature resistance

・The melting point of Hf is as high as 2233°C, making it suitable for high-temperature sputtering processes

(e.g., semiconductor manufacturing).

・Hf maintains excellent mechanical strength and chemical stability at high temperatures.

２）Excellent corrosion resistance

・Hf has extremely high corrosion resistance to corrosive media such as acids, alkalis, and seawater at room temperature.

・The surface easily forms a dense oxide film (HfO₂), further reinforcing its antioxidant properties.

３）High Purity and Uniformity

・The purity of industrial-grade Hf targets is usually ≥99.9% (3 N), while high-purity Hf targets can reach 99.95%

(3N5) or higher.

・Uniform crystal grain size (<50 μm) ensures stability and consistency of thin film deposition.

４）Excellent nucle performance

2. Main Applications

１）Semiconductor and microelectronics industries

 ・High dielectric constant (High-k) gate materials: HfO₂ (hafnium oxide) thin films are used to produce advanced process chips (e.g., 7 nm or less) instead of conventional SiO₂ to reduce leakage current.

・Copper Interconnect Barrier Layer: Hf thin film prevents copper (Cu) from diffusing into the silicon substrate, thereby increasing the reliability of integrated circuits.

２）Nuclear power industry

・Nuclear reactor control rods: Hafnium's high neutron absorption capacity is used to regulate fission reaction rates and ensure the safe operation of nuclear reactors.

   ・Nuclear fuel coatings: Hf alloys can enhance the corrosion and irradiation resistance of fuel rods. 

３）Aerospace and high temperature coatings

 ・Aero engine parts: Hf alloys are used for high-temperature components such as turbine blades and combustion chambers to  enhance heat resistance and antioxidant properties.

・Thermal barrier coatings (TBCs): HfO₂ can serve as a component of thermal barrier coatings that protect metal substrates from high temperature oxidation.

４）Optical and optoelectronic fields

 ・Anti-reflective and high refractive index films: Used in optical lenses, lasers, and AR/VR devices to improve light transmission.

・X-ray diffraction targets: Hf targets can be used in X-ray tubes to provide a stable radiation source.

５）Medical and biomaterials

・Medical implant coatings: Hf is biocompatible and can be used for surface treatment of plastic implants such as artificial joints to reduce rejection.