Cobalt (Co) Targets

Cobalt (Co) Targets
Cobalt (Co) Targets

An important sputtering material, it is made from high-purity metal Co and widely applied in many high-tech fields due to its unique magnetic energy, corrosion resistance and high temperature stability.

 

1. Characteristics

1)Excellent magnetic energy

Ferromagnetism: Co is ferromagnetic and has a Curie temperature as high as 1121°C, much higher than iron (770°C)

 and nickel (360°C).

High magnetic crystal anisotropy: Co is suitable for high-density magnetic recording media and magnetic sensors.

2)High melting point and high temperature resistance

Melting point up to 1495°C, suitable for high temperature sputtering process.

Maintains good mechanical strength and chemical stability at high temperatures.

3)High corrosion resistance

・High resistance to corrosive agent such as acids and alkalis at room temperature.

The surface easily forms a dense oxide film (CoO/Co 8323 O 8324), which enhances its antioxidant capacity.

4)High purity and uniformity

The purity of industrial grade Co target is usually ≥99.9% (3 N), and high purity Co target can reach 99.99% (4 N) or higher.

Uniform crystal grain size (<30 μm) ensures stability and uniformity of thin film deposition.

5) Good electrical and thermal conductivity

The electrical conductivity is about 1.6 x 10 x S/m, making it suitable for the production of conductive thin films in the

 electronics industry.

Thermal conductivity of about 100 W/(m-K), which helps heat dissipation during sputtering.

 

2. Main Applications

1)Magnetic memory and sensors

Hard disk drive (HDD): Used for thin-film deposition of magnetic storage device to increase storage density.

Magnetic random memory (MRAM): Ferromagnetic layer material used in next-generation nonvolatile memory.

Magnetic sensors: Hall sensors, magnetoresistive sensors for automotive, and industrial inspection.

2)Semiconductor and microelectronics

Copper Interconnect Barrier Layer: Co thin film prevents copper (Cu) from diffusing into the silicon substrate, thereby increasing the reliability of integrated circuits.

Electrode materials: Contact layer and interconnect materials for high-end process chips.

3)New Energy and Battery Technologies

Lithium-ion batteries: Co oxides such as LiCoO₂ are important components of cathode materials to increase the energy density of batteries.

Fuel cells: Co-based catalysts are used in the oxygen reduction reaction (ORR) to improve fuel cell performance.

4)Optical and optoelectronic fields

   ・Anti-reflective and highly reflective films: Co films are used as reflective layers in optical devices and solar cells.

   ・Transparent conductive films : Co-doped oxide films for displays and touch screens.

5)Industrial Coatings and Tool Coatings

Anti-wear coatings: Used to extend the usage life of tools and dies.

Anti-corrosion layer : Co alloy layer is used for chemical industry facilities and marine works to increase corrosion resistance.

6)Medical and biological materials

Medical implants: Co chromium alloys (e.g. CoCrMo) are used for artificial joints and dental implants, and have excellent

wear resistance and biocompatibility.

MRI contrast agents: Co-based nanoparticles contrast enhancement for magnetic resonance imaging (MRI).