An alloy sputtering target consisting of aluminum (Al) and titanium (Ti) is used for thin film deposition processes such as magnetron sputtering (PVD) and electron beam evaporation.

Their unique alloy properties play an important role in areas such as blade coatings, decorative films, semiconductor and

optical films.

1. Characteristics

1) High Purity and Low Impurity

・The purity of industrial grade AlTi targets is typically ≥99.9%, and for high-end applications (e.g. semiconductors)

can reach >99.99%.

・Impurity content such as oxygen (O), nitrogen (N), and carbon (C) are strictly controlled,and oxygen content <200 ppm is required for some applications.

2) Excellent hardness and wear resistance

・AlTi alloys form intermetallic compounds such as Al 3 Ti and AlTi, have high hardness(HV 800-1200), and are suitable

for tool coatings such as AlTiN.

・By sputtering in a nitrogen (N gallium) environment, a carbide nitride AlTi (AlTiN) coating can be formed, which significantly improves the life of cutting tools.

3) Good corrosion resistance

・The addition of titanium enhances the corrosion resistance of aluminum, and making it suitable for corrosion-resistant layers in marine environments and chemical industry facilities.

4) Adjustable component ratios

・General composition ratios: Al-10%Ti, Al-30%Ti, Al-50%Ti (atomic ratio) are reflected in hardness, electrical conductivity, and sputtering performance in each composition ratio.

・High aluminum content (Al≥50%) targets can be produced using vacuum induction melting ,  and high titanium content (Ti≥50%) must be produced using powder metallurgy technology.

5) High density and uniform microstructure

・Hot isostatic pressing (HIP) or vacuum induction melting (VIM) processes are used to ensure target induced density >98% ,crystal grain fineness (<100μm), and sputter stability

2. Main applications

1) Tool and mold coatings

・Used for coating cutting tools (milling cutters, drills) to form AlTiN coating to improve wear resistance and high temperature stability.

・Caoting AlTi alloys on mold surfaces to increase wear resistance and extend usage life.

2) Decorative film

・Used in decorative coatings for watches, jewelry, and electronic products, providing metallic luster and abrasion resistance.

3) Semiconductor and electronics industries

・As a metallization layer for integrated circuit (IC), it improves conductivity and electrical migration prevention performance.

・ Use as electrode material in flat panel displays (TFT-LCD) in place of conventional Al-Si-Cu alloys.

4) Optical Coatings

  Used in Low-E (low emissivity) glass coatings to improve thermal insulation and light transmission.

・Function as anti-reflective coating or conductive layer in lenses and solar cells.